PRODUCTS & SERVICES

General Product Listing

300mm quartzware300MM

The Recognized Leader in Design Support, Volume Production and Repeatable Quality of all product types of 300mm quartzware.

Applied Materials

ASP Tubes
Inserts
Robot Blades 
Cassettes
Insulators
Shadow Rings
Clamping Rings
Liners
Sputter Rings
Collars
Pinless Insulators
Water Lifts
Domes
Plasma Tubes
Windows
 Focus Rings
Pre-clean Bell Jars
 


AMAT Disclaimer: These items are representative of Tosoh's capabilities; however, they were produced exclusively for Applied Materials, and are copyright, trademark, and in some cases, patent protected. Therefore, any duplication, reproduction, or sale of these components by Tosoh Quartz to any third party without the express written consent of Applied Materials is strictly prohibited.

ASM

Tosoh Quartz is an ASM Certified Supplier for 200mm and 300mm quartz parts for CVD & Diffusion product lines. Click here to view certificate (PDF: 1.08 MB) »

Adapter Plates
Inlet Tube
ATM / Diffusion Tubes
Pedestals
Balloon
Sleeve
CVD Tubes (Liners / Outers)
Socket
Doors
Suspension Rings
Exhaust Ring
T / C Bridge
Heat Shields
Torches
Injectors
Wafer Carriers

Batch EPI


Bell Jar 7600/7700/7800 series
Sensor Sheaths
Bell Jar Insert
Hanger(s)
Cover Ring
Radiometer Sheath
Purge Baffle


Hitachi Kokusai Electric

Tosoh Quartz is a Hitachi Kokusai Electric Certified Approved Supplier for 300mm Quartz Ware. Click here to view certificate (PDF: 20KB) »


Caps & Pedestals
CVD Tubes (Outer/Inner)
Dust Covers
Exhaust Tubes
Nozzles
Pins
Plate Holders
Shutter Plates
Tubes ATM
Tweezers
Water Carriers

Horizontal Products

Over 1,500 products available - Please contact us for a quotation of your drawing.
Baffles
Doors
Nozzles
Pins
Injectors
Liners
LTO Cages
Paddles & Sleds
Process Tubes
Wafer Carriers

SPTS (formerly Aviza/SVG)

VTR
AVP
ATM Tubes
Doors
CVD Tubes
Injectors
Doors
Liners
Injectors
Pedestals
Pedestals
Process Tubes
 Wafer Carriers
Wafer Carriers

Tokyo Electron Tohoku Ltd.

Tosoh Quartz is a Tokyo Electron Tohoku Ltd. Certified Approved Supplier for 8 inch, 12 inch, FORMULA, super high purity and ultra high purity Quartz Ware. 

Click here to view certificate (PDF: 334KB) »