300MM
The Recognized Leader in Design Support, Volume Production and Repeatable Quality of all product types of 300mm quartzware.
ASM
Tosoh Quartz is an ASM Certified Supplier for 200mm and 300mm quartz parts for CVD & Diffusion product lines. Click here to view certificate (PDF: 1.08 MB) »
Adapter Plates
| Inlet Tube
|
ATM / Diffusion Tubes
| Pedestals
|
Balloon
| Sleeve
|
CVD Tubes (Liners / Outers)
| Socket
|
Doors
| Suspension Rings
|
Exhaust Ring
| T / C Bridge
|
Heat Shields
| Torches
|
Injectors
| Wafer Carriers
|
Hitachi Kokusai Electric
Tosoh Quartz is a Hitachi Kokusai Electric Certified Approved Supplier for 300mm Quartz Ware. Click here to view certificate (PDF: 20KB) »
Caps & Pedestals
| CVD Tubes (Outer/Inner)
|
Dust Covers
| Exhaust Tubes
|
Nozzles
| Pins
|
Plate Holders
| Shutter Plates
|
Tubes ATM
| Tweezers
|
Water Carriers
|
|
Tokyo Electron Tohoku Ltd.
Tosoh Quartz is a Tokyo Electron Tohoku Ltd. Certified Approved Supplier for 8 inch, 12 inch, FORMULA, super high purity and ultra high purity Quartz Ware.
Click link below to view certificate (PDF):
US
UK