News/ Press Releases
Prior Releases:
April 27, 2006: Announcement of Officer Appointments
September 1, 2005: Appointment of Ash Sharma
November 15, 2004: Appointment of Terry Williams
June 10, 2004: TOSOH Announces Fiscal 2003 Consolidated Results
April 27, 2004: TOSOH Move on China Results in Largest VCM Player in Asia
April 23, 2004: TOSOH Announces Earnings Outlook for Fiscal 2004
July 7, 2003: TOSOH Creates Global 'Electronic Materials Division'
December 2, 2002: TOSOH Quartz Restructure
October 18, 2001: TOSOH Quartz Restructure
January 2, 2001: New Designator
December 5, 2000: Birth of a Global Name
November 13, 2000: Patrick Davis
September 8, 2000: Loren Sutherland
September 25, 2000: Film Adhesion
November 24, 1999: Gunther Weiss
June 15, 1999 Loren Sutherland Arrival
(Prior releases require Adobe Acrobat Reader. Click here for free download.)
FROM:
TOSOH Quartz, Inc.
DATE: 15 March 2007
RE: TOSOH Quartz Inc. Successfully Qualifies as Tokyo Electron Ltd. SHP
Supplier
(From www.tel.com website)
| TELFORMULA is an advanced thermal processing system for 300mm wafers capable of handling a wide range of oxidation and low pressure chemical vapor deposition (LPCVD) processes for advanced nano-scale technology for 100nm node generation device production and beyond. With the fast thermal response heater, in-situ cleaning, and short cycle time, the TELFORMULA is flexible for development and cost efficient for high-volume manufacturing. |
|
Applications
- General oxidation and anneal
- Oxide and nitride LPCVD
- Ultra thin gate dielectrics
- Radical oxidation
- High-k dielectrics
- Multi stack films
- Ultra low temperature anneals (for BEOL)
Features
- All quartz reactor
- In-situ cleaning
- Mini batch system
- State-of-the-art heater element technology
FOR ADDITIONAL INFORMATION CONTACT:
Becca
Davis
Marketing & Communications Manager
TOSOH Quartz
(503) 605-5706
www.tosohquartz.com
Globally,
TOSOH
Quartz companies include:
TOSOH
Quartz, Inc.,
Portland, OR
TOSOH Quartz Inc., Durham, UK
TOSOH Quartz Corporation, Yamagata, Japan
TOSOH Quartz Co., Ltd., Tainan,
Taiwan;
Hsin Chu,
Taiwan
For more information on TOSOH Quartz’s activities,
visit the following web sites:
http://www.tosoh.com/EnglishHomePage/tcdiv/frtcdiv.htm
TOSOH CORPORATION
3-8-2 Shiba, Minato-ku, Tokyo 105-8623 JAPANTel: +81-3-5427-5118 Fax: +81-3-5427-5198
E-mail: info@tosoh.co.jp
Webpage: www.tosoh.com
Headquartered in Tokyo, Japan, Tosoh Corporation is a diversified global chemical and specialty materials company. Founded in 1935, the Company has expanded its reach into high value-added businesses such as fine chemicals, scientific instrumentation, thin film materials and quartzware. Tosoh is a multi-billion dollar corporation that employs more than 9,000 people worldwide and is listed on the Tokyo and Osaka stock exchanges.
Stock Exchange Ticker Symbol: 4042
For more information, please contact:
International Public Relations
Tosoh Corporation
m_hoover@tosoh.co.jp
Tel: +81-3-5427-5118
Fax: +81-3-5427-5198
www.tosoh.com
Disclaimer
This release contains forward-looking statements, including without limitation,
statements concerning product development, objectives, goals, and commercial
introduction, which involve certain risks and uncertainties. The
forward-looking statements are also identified through use of the words
"anticipates," "plans," "expects," and other
words of similar meaning. Actual results may differ significantly from the
expectations contained in the forward-looking statements.
TELFORMULA
See www.tel.com for
full product details
Feedback